Thermal stability of a thin film polymer should be in excess of processing or use temperatures.

Isothermal TGA
2µm CYCLOTENE* film on wafer in He

Isothermal TGA 2µm CYCLOTENE* film on wafer in He

Weight evolution from a 10 µm film of CYCLOTENE 4026-46 Resin
(isothermal TGA) under nitrogen at 350ºC.

Weight evolution from a 10 µm film of CYCLOTENE 4026-46 Resin (isothermal TGA) under nitrogen at 350ºC.

[Ref: 1998-06]


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