Planarization

A basic requirement of a dielectric layer is to planarize the underlying topography and thus provide a flat focal plane for subsequent layers. Thin films of CYCLOTENE* resin exhibit excellent planarization properties as shown below.

Planarization of CYCLOTENE 3022 Resins over 4µm thick isolated Al lines

[Ref: 1993-9]

Planarization of isolated lines by CYCLOTENE 4024-40 and 4026-46 Resins

[Ref: 1996-01]

®™^* Trademark of The Dow Chemical Company ("Dow") or an affiliated company of Dow