Dry Etch Film Thickness
CYCLOTENE 3000 Thickness
Spread 10s @ 500 RPM, Spin 30 s @ speed
Spin Speed
(RPM) |
Thickness (µm) |
| 3022-35 |
3022-45 |
3022-57 |
3022-63 |
| 1000 |
2.256 |
5.463 |
13.81 |
26.18 |
| 1100 |
2.150 |
5.185 |
13.00 |
24.51 |
| 1200 |
2.058 |
4.946 |
12.30 |
23.09 |
| 1300 |
1.977 |
4.736 |
11.70 |
21.87 |
| 1400 |
1.905 |
4.550 |
11.18 |
20.81 |
| 1500 |
1.840 |
4.385 |
10.72 |
19.88 |
| 1600 |
1.782 |
4.236 |
10.31 |
19.05 |
| 1700 |
1.729 |
4.102 |
9.947 |
18.32 |
| 1800 |
1.680 |
3.979 |
9.617 |
17.65 |
| 1900 |
1.635 |
3.867 |
9.317 |
17.05 |
| 2000 |
1.594 |
3.764 |
9.044 |
16.51 |
| 2100 |
1.556 |
3.668 |
8.794 |
16.01 |
| 2200 |
1.520 |
3.580 |
8.564 |
15.55 |
| 2300 |
1.487 |
3.498 |
8.351 |
15.13 |
| 2400 |
1.456 |
3.421 |
8.153 |
14.73 |
| 2500 |
1.427 |
3.349 |
7.970 |
14.37 |
| 2600 |
1.399 |
3.282 |
7.798 |
14.03 |
| 2700 |
1.373 |
3.218 |
7.638 |
13.72 |
| 2800 |
1.349 |
3.158 |
7.487 |
13.42 |
| 2900 |
1.325 |
3.102 |
7.346 |
13.14 |
| 3000 |
1.303 |
3.048 |
7.213 |
12.88 |
| 3100 |
1.282 |
2.997 |
7.087 |
12.63 |
| 3200 |
1.262 |
2.949 |
6.968 |
12.40 |
| 3300 |
1.243 |
2.903 |
6.855 |
12.18 |
| 3400 |
1.225 |
2.859 |
6.748 |
11.97 |
| 3500 |
1.208 |
2.817 |
6.646 |
11.77 |
| 3600 |
1.191 |
2.777 |
6.549 |
11.58 |
| 3700 |
1.175 |
2.738 |
6.456 |
11.40 |
| 3800 |
1.160 |
2.702 |
6.368 |
11.23 |
| 3900 |
1.145 |
2.666 |
6.283 |
11.06 |
| 4000 |
1.131 |
2.632 |
6.202 |
10.90 |
| 4100 |
1.117 |
2.600 |
6.124 |
10.75 |
| 4200 |
1.104 |
2.568 |
6.050 |
10.61 |
| 4300 |
1.091 |
2.538 |
5.979 |
10.47 |
| 4400 |
1.079 |
2.509 |
5.910 |
10.34 |
| 4500 |
1.067 |
2.481 |
5.844 |
10.21 |
| 4600 |
1.056 |
2.454 |
5.780 |
10.09 |
| 4700 |
1.044 |
2.427 |
5.719 |
9.968 |
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