CYCLOTENE Dry-Etch Resins

Thin films made of dry-etch CYCLOTENE* 3000 Series resins are ideal for those applications where a thin, dielectric layer is required, or where a protective layer is needed for passivation or chemical resistance.

CYCLOTENE XU-71918.30 resin was designed for active matrix LCD applications where high optical transparency is required.

Characteristics

• Etchable in oxygen/fluorine plasmas (O₂/CF₄, O₂/SF₆, O₂/NF₃)
  
• Laser etchable
  
• Planarization — ca. 90% over isolated features (< 100µm)

®™^* Trademark of The Dow Chemical Company ("Dow") or an affiliated company of Dow