CYCLOTENE* is used as a low-K dielectric for interconnect on gallium arsenide devices. The excellent planarization characteristics of CYCLOTENE enable planar interconnect structures to be built without CMP.
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Process Cross Section
TriQuint Semiconductor |
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Interconnect using CYCLOTENE (dielectric was removed to aid visualization)
TriQuint Semiconductor |
®™* Trademark of The Dow Chemical Company ("Dow") or an affiliated company of Dow
